SM5651-008-D-3-SR

 美国Silicon Microstructures INC.开发了一系列价位低、线性度在0.3%到0.05%范围内的硅微结构压阻式传感器，满量程为0.15psi(1KPa)、0.3psi(2KPa)、0.8psi(5KPa)、1.5psi(10KPa)、3 psi(20KPa)、***满量程为0.15psi(1KPa)，被列为***压力测量范围。

SM5651-008-D-3-SR

HIGHLIGHTS-> Low pressures for sensitive applicATIons-> Constant current driven-> Dual inline package (DIP)-> Fully temperature compensated and calibrated-> Primary pressure port on back-side of sensor die, protectingside of sensor-> Span calibration using integrated resistor and external opamps

TYPICAL APPLICATIONS-> Medical equipment-> Respiration-> HVAC-> Level detection-> Flow measurement-> Industrial control

TECHNICAL FEATURES-> 0.15, 0.3, 1.5 PSI/ 1.0, 2.1, 10.3 kPa-> Easy-to-use dual inline package (DIP)-> Zero offset calibration-> High-performance, stable packaged silicon chip-> Wide 0-60C compensated temperature range

DEscriptION The SM5600 Series of OEM pressure sensors are laser trimmed, temperature-compensated, low-pressure sensors in dual in-line packages for printed circuit board mounting. These sensors offer improved performance as well as the option for constant current excitation. With the ability to detect pressure ranges as low as 0.15 PSI full scale, the SM5651 is ideal for a pplications requiring extreme sensitivity, from respiration to air filter obstructions.

The SM5600 Series pressure sensors are constructed by attaching a highly sta ble piezoresistive pressu re sensor chip to aceramic substrate. Thick film resistors on the ceramic are laser trimmed during manufacturing to provide zero offset calibration,temperature compensation for zero offset, and temperature compensation for sensitivity. In the SM5651 an additional resistor is trimmed to normalize the output of an externaldifferential amplifier to provide span calibration when the sensor is driven by a constant current supply. Various pressu re port configu rations a re availa ble for flexibilityin matching this product to specific applications.

ABSOLUTE MAXIMUM RATING TABLE FOR SM5651

All parameters are specifed with excitation current = 1.5mA at room temperature, unless otherwise noted.

OPERATING CHARACTERISTICS FOR SM5651 - SPECIFICATIonSAll parameters are specifed with excitation current = 1.5mA at room temperature, unless otherwise noted.

NOTES:(a)Positive Pressu re is defined as entry on the bottom side of the die; gain, during factory calibration, is set using negative pressure.(b) Values given for top side.(c)Measured over a temperature range of 22C to 58C.(d) Tested on a sample basis.(e)Sensitivity Matching is measured by the part-to-part matching of span.(f) Clean, dry gas compatible with wetted materials. Wetted materials include Pyrex glass, silicon, alumina ceramic, epoxy, RTV, gold, aluminum, and nickel.

All dimensions are shown in millimeters

NOTES:. Do not connect to NC pins..External connections to NC pins will cause pa rt malfunction.. Tolerance on all dimensions +0.13 mm unless otherwise specified.. [B] is tube connected to bottom side of sensor die.. [T] is tube connected to top side of sensor die.. Tube [B] is used for positive differential pressure.

Pin Configuration. Pins opposite direction of tube

Tube LengthL: Long (12.45 mm + 0.10 mm)S: Short (8.25 mm + 0.10 mm)

Pressure TypeD: Differential (2 Tubes)

Typical Circuit Configuration for SM5651

Ordering Information

SM5651-008-D-3-SR 
 SM5651-001-G-3-LR 
 SM5651-003-D-3-SR 
 SM5651-001-D-3-SR 
 SM5651-008-G-3-SR
 SM5651-008-D-3-LR 
 SM5651-015-G-3-LR 
 SM5651-003-D-3-LR 
 SM5651-003-G-3-SR 
 SM5651-015-D-3-LR
 SM5651-015-D-3-SR 
 SM5651-003-G-3-LR 
 SM5651-008-G-3-LR 
 SM5651-015-G-3-SR 
 SM5651-001-D-3-LR
 SM5651-001-G-3-SR 
 SM5651-003-D-3-NR 
 SM5651-030-D-3-SR
 SM5652-003-G-3-LR
 SM5652-008-G-3-LR
 SM5652-015-D-3-SR
 SM5652-001-G-3-LR
 SM5652-008-D-3-SR
 SM5652-001-D-3-SR
 SM5652-008-G-3-SR
 SM5652-003-D-3-SR
 SM5652-008-D-3-LR
 SM5652-003-G-3-SR
 SM5652-015-D-3-LR
 SM5652-015-G-3-LR
 SM5652-003-D-3-LR
 SM5652-015-G-3-SR
 SM5652-001-G-3-SR
 SM5652-001-D-3-LR
 SM5652-001-D-3-NR
 SM5652-001-D-3-LHR
 SM5652-015-D-3-NR
 SM5652-002-G-3-SR
 SM5652-008-D-3-NR
 SM5102-005-GX
 SM5102-015-GX
 SM5102-015-AX
 SM5102-030-GX
 SM5102-030-AX
 SM5102-060-GX
 SM5102-060-AX
 SM5102-100-GX
 SM5102-100-AX
 SM5103-003-GX
 SM5103-008-GX
 SM5103-015-GX
 SM5108C-015-AX
 SM5108C-030-AX
 SM5108C-060-AX
 SM5108C-150-AX
 SM5420C-015-A-H-T
 SM5420C-015-A-P-T
 SM5420C-030-A-H-T
 SM5420C-015-A-P-T
 SM5420C-060-A-H-T
 SM5420C-060-A-P-T
 SM5420C-100-A-H-T
 SM5420C-100-A-H-T
 SM5470-001-G-C-TR
 SM5470-001-G-B
 SM5470-003-D-C
 SM5470-001-D-B
 SM5470-001-D-C-TR
 SM5470-003-G-B-TR
 SM5470-001-G-C
 SM5470-008-D-B
 SM5470-001-D-B-TR
 SM5470-003-D-C-TR
 SM5470-003-D-B-TR
 SM5470-003-G-B
 SM5470-001-G-B-TR
 SM5470-003-D-B
 SM5470-008-D-B-TR
 SM5470-030-G-C
 SM5470-030-D-C
 SM5470-015-G-B
 SM5470-008-G-C
 SM5430-015-G-B
 SM5430-030-D-B
 SM5611-015-G-3-LR
 SM5611-060-D-3-SR
 SM5612-015-A-5-NR
 SM5612-060-D-3-NR
 SM5812-005-A-3-LR
 SM5812-005-D-3-LR
 SM5812-005-S-3-LR
 SM5812-015-D-3-LR
 SM5812-015-G-3-LR
 SM5812-030-D-3-LR
 SM5812-030-G-3-LR
 SM5812-030-G-3-SR
 SM5812-060-A-3-LR
 SM5812-060-G-3-LR
 SM5812-100-G-3-LR
 SM5812-100-G-3-SR
 SM5812-100-S-3-LR
 SM5822-015-D-B
 SM5822-015-A-B-TR
 SM5822-015-S-B-TR
 SM5822-060-A-B-TR
 SM5822-015-S-B
 SM5822-015-D-B-TR
 SM5822-060-A-B
 SM5822-015-A-B
 SM5822-100-D-B
 SM5822-100-G-B
 SM5822-015-G-B
 SM5822-100-S-B
 SM5852-001-D-3-LR
 SM5852-001-S-3-LR
 SM5852-003-D-3-LR
 SM5852-003-S-3-LR
 SM5852-004-S-3-SR
 SM5852-015-G-3-LR
 SM5882-006-D-B
 SM5882-006-G-B
 SM5882-006-S-B
 SM5882-015-D-B
 SM5882-015-G-B
 SM5882-015-S-B
 SM6842-015-A-C-S
 SM9221-030-A-D
 SM9221-060-A-D
 SM9221-150-A-D
 SM9221-300-A-D
 SM9541-010C-S-C-3-S
 SM9541-010C-D-C-3-S
 SM9541-020C-S-C-3-S
 SM9541-020C-D-C-3-S
 SM9541-040C-S-C-3-S
 SM9541-040C-D-C-3-S
 SM9541-100C-S-C-3-S
 SM9541-100C-D-C-3-S
 SM9543-005M-D-C-3-S
 SM5420-015-A-H-T
 SM5420-030-A-H-T
 SM5420-060-A-H-T
 SM5420-100-A-H-T
 SM5882-006-D-B
 SM5882-006-S-B
 SM5882-015-D-B
 SM5882-015-S-B
 SM5420C-015-A-H-T
 SM5420C-015-A-P-T
 SM5420C-030-A-H-T
 SM5420C-030-A-P-T
 SM5420C-060-A-H-T
 SM5420C-060-A-P-T
 SM5420C-100-A-H-T
 SM5420C-100-A-P-T
 SM5470-001-D-B
 SM5470-001-G-B
 SM5470-001-D-C
 SM5470-003-D-B
 SM5651-001-D-3-LR
 SM5651-001-D-3-SR
 SM5651-003-D-3-SR
 SM5651-015-D-3-SR
 SM5652-001-D-3-LR
 SM5652-001-D-3-SR
 SM5652-003-D-3-LR
 SM5652-003-D-3-SR
 SM5652-003-G-3-SR
 SM5652-008-D-3-SR
 SM5652-015-D-3-LR
 SM5652-015-D-3-SR
 SM5852-015W-D-3-LR
 SM5852-001-D-3-LR
 SM5852-001-S-3-LR
 SM5852-003-D-3-LR
 SM5852-008-G-3-SR
 SM5852-003-S-3-LR
 SM5852-004-S-3-SR
 SM5852-015-G-3-LR
 SM5822-015-A-B
 SM5822-015-D-B
 SM5822-015-G-B
 SM5822-015-S-B
 SM5822-060-A-B
 SM5102-005-GX
 SM5102-015-GX
 SM5102-015-AX
 SM5102-030-GX
 SM5102-030-AX
 SM5102-060-GX
 SM5102-060-AX
 SM5102-100-GX
 SM5102-100-AX
 SM5103-003-GX
 SM5103-008-GX
 SM5103-015-GX
 SM5106-015-AX
 SM5106-030-AX
 SM5106-060-AX
 SM5106-150-AX
 SM5108C-015-AX
 SM5108C-030-AX
 SM5108C-060-AX
 SM5108C-150-AX
 SM9221-150-A-D
 SM9221-300-A-D
 SM2120-005-G-D
 SM5470-003-D-C
 SM5470-008-D-B
 SM5470-008-D-C
 SM5420C-015-A-H-T
 SM5420C-015-A-P-T
 SM5420C-030-A-H-T
 SM5420C-030-A-P-T
 SM5420C-060-A-H-T
 SM5420C-060-A-P-T
 SM5420C-100-A-H-T
 SM5420C-100-A-P-T
 SM5852-001-D-3-LR
 SM5852-003-D-3-LR
 SM5852-003-S-3-LR
 SM5852-004-S-3-LR
 SM5852-008-G-3-SR
 SM5852-015-G-3-LR
 SM5882-006-D-B
 SM5882-006-S-B
 SM5882-015-D-B
 SM5882-015-S-B
 SM5103-015-GX
 SM5102-005-GX
 SM5470-001-D-B
 SM5470-001-G-B
 SM5470-003-D-B
 SM5470-008-D-B
 SM5420C-015-A-H-T
 SM5420C-015-A-H-T
 SM5420C-015-A-P-T
 SM542C-030-A-H-T
 SM5420C-030-A-P-T
 SM5420C-060-A-H-T
 SM5420C-060-A-P-T
 SM5420C-100-A-H-T
 SM5420C-100-A-P-T
 SM6841-015-A-H-T
 SM6841-030-A-H-T
 SM6841-060-A-H-T
 SM6841-100-A-H-T
 SM6841-015-A-H-S
 SM6841-030-A-H-S
 SM6841-060-A-H-S
 SM6841-100-A-H-S
 SM9541-010C-S-C-3-S
 SM9541-010C-D-C-3-S
 SM9541-020C-S-C-3-S
 SM9541-020C-D-C-3-S
 SM9541-040C-S-C-3-S
 SM9541-040C-D-C-3-S
 SM9541-100C-S-C-3-S
 SM9541-100C-D-C-3-S
 SM9221-030-A-D
 SM9221-060-A-D
 SM6842-015-A-C-S

 SM5651-008-D-3-SR 
 SM5651-001-G-3-LR 
 SM5651-003-D-3-SR 
 SM5651-001-D-3-SR 
 SM5651-008-G-3-SR
 SM5651-008-D-3-LR 
 SM5651-015-G-3-LR 
 SM5651-003-D-3-LR 
 SM5651-003-G-3-SR 
 SM5651-015-D-3-LR
 SM5651-015-D-3-SR 
 SM5651-003-G-3-LR 
 SM5651-008-G-3-LR 
 SM5651-015-G-3-SR 
 SM5651-001-D-3-LR
 SM5651-001-G-3-SR 
 SM5651-003-D-3-NR 
 SM5651-030-D-3-SR

PN13156

PN13104

PN13101

RM3100

TCM-XB

PN12810

NPC-1210-10WD-3S

NPC-1210-001D-3S

NPC-1210-005D-3S

NPC-1210-01***-3S

NPI-19A-021GH

NPI-19A-031GH

NPA-700B-10WD

NPA-700B-001D

NPA-700B-01***

SM5651-001-D-3-SR 

SM5651-003-D-3-SR 

SM5651-008-D-3-SR 

SM5651-015-D-3-SR 

SM5852-001-D-3-LR

SM5852-003-D-3-LR

SM5852-015W-D-3-LR

SM9541-010C-S-C-3-S

SM9541-010C-D-C-3-S

SM9541-020C-S-C-3-S

SM9541-020C-D-C-3-S

DLC-L01D-D4

DLC-L02D-D4

DLC-L05D-D4

DLC-L10D-D4

DLC-L20D-D4

DLC-L30D-D4

DLC-L60D-D4

DLC-005D-D4

DLC-015D-D4

DLC-030D-D4

DLC-100D-D4

DLC-150D-D4

0.5 INCH-D-MV

1 INCH-D-MV

2 INCH-D-MV

5 INCH-D-MV

10 INCH-D-MV

20 INCH-D-MV

30 INCH-D-MV

1 INCH-D-4V

1 INCH-G-4V

2.5 INCH-D-4V

2.5 INCH-G-4V

5 INCH-D-4V

5 INCH-G-4V

10 INCH-D-4V

10 INCH-G-4V

20 INCH-D-4V

20 INCH-G-4V

30 INCH-D-4V

30 INCH-G-4V

40 INCH-G-4V

60 INCH-G-4V

0.25 INCH-D-4V

0.25 INCH-G-4V

0.5 INCH-D-4V

0.5 INCH-G-4V

DLVR-L01D-E1NS-C-NI3F

DLVR-L01D-E1BD-I-NI3N

DLVR-L02D-E1NS-C-NI3F

DLVR-L60D-E1NS-C-NI3F

DLVR-L10D-E1NS-C-NI3F

DLVR-L02D-E1NJ-C-NI5F

DLVR-F50D-E1ND-I-NI3L

DLVR-L10D-E2NS-C-NI5F

DLVR-L02D-E1NJ-C-NI3F

DLVR-L02D-E2NJ-C-NI5F

DLVR-L02D-E2NS-C-NI5F

DLVR-L10D-E2NS-C-NI3F

DLVR-F50D-E1BD-I-NI3L

DLVR-L60D-E1NJ-C-NI3F

DLVR-L10D-E1NJ-C-NI3F

DLVR-L10D-E1NJ-C-NI5F

DLVR-L10D-E2NJ-C-NI3F

DLVR-L02D-E2NS-C-NI3F

DLVR-L10D-E2NJ-C-NI5F

DLHR-L02D-E1BD-C-NAV8

DLHR-L02G-E1BD-C-NAV8

DLHR-L05D-E1BD-C-NAV8

DLHR-L30D-E1BD-C-NAV8

DLHR-L10D-E1BD-C-NAV8

DLHR-L10G-E1BD-C-NAV8

DLHR-L01G-E1BD-C-NAV8

DLHR-L30G-E1BD-C-NAV8

DLHR-L05G-E1BD-C-NAV8

DLHR-F50D-E1BD-C-NAV8

DLHR-L01D-E1BD-C-NAV8

DLHR-F50G-E1BD-C-NAV8

PCIH47F300A1/AA

PCIH47M400A1/AA

PCIH49W25M400A1/AA-378.0

PCIH49W25F300A1/AA-379.0

PCIH47F9300A1/AA

SDP610-500pa

SDP610-125pa

SDP610-25pa

SDP1000-L025

SDP1000-L05

SDP1000-L

SDP1000-R

SDP2000-L

SDP1108-R

SDP2108-R

SDP31-500Pa

SDP32-125Pa

SDP810-500pa

SDP810-125pa

PLF2105 V/D

PLF2135 V/D

PMF2101 V/D

PMF2102 V/D

PMF2103 V/D

PMF2104 V/D

PMF2105 V/D

PMF2108 V/D

PMF4101 V/D

PMF4102 V/D

PMF4103 V/D

PMF4104 V/D

PMF5006 V/D

PMF5007 V/D

PMF5003 V/D

PMF5008 V/D

PMF5009 V/D

PMF6102 V/D

PMF6106 V/D

PMF8225

PMF8226

PMF8228

PMF8262

PMF8265

PMF8268

AWM1100V

AWM1200V

AWM1300V

AWM2100V

AWM2100VH

AWM2150V

AWM2200V

AWM2300V

AWM2300VH 

AWM42150VH

AWM42300V

AWM92100V

AWM92200V

AWM3100V 

AWM3130V 

AWM3150V 

AWM3200CR

AWM3200V

AWM3201CR

AWM3205V

AWM3300V

AWM3303V

AWM5101VN 

AWM5102VA

AWM5102VC 

AWM5102VN

AWM5103VA

AWM5103VC

AWM5103VN

AWM5104VA

AWM720P1

AWM730B5

AWM43300V

AWM43600V

SLG-0025

SLG-0075

SLG-0150

SLI-0430

SLI-1000

SLI-2000

SLS-1500

SLQ-QT105

SLQ-QT500

SLF3S-1300F

LS32-1500

LG16-0025

LG16-0150

LG16-0430

LG16-1000

LG16-2000

LG16-2000HC

LG01-2000

LPG10-1000

LD20-2600B

LD20-0600L

SFM3000 

SFM3100

SFM3200

SFM3200-AW

SFM3300-AW

SFM3300-D

SFM3400-AW

SFM3400-D

SFM4100

SFM4200

SFM5300

SFM5400

PVC1001-1 TO5 

PVC1001-2 TO5 

PVC1004-1 TO46 

PVC1004-2 TO46 

PVC3001 TO5 

PVC3004 TO46 

北京盛思瑞特传感技术有限公司   

联系人：金先生  QQ：2355647911 

电话：13661102955

地址：北京市昌平区振兴路28号绿创大厦B520